Measurement & control

Type of media Gases
Flow range min. 0.12…6 mln
/min
max. 1…50 ln
/min
Accuracy ±0.5% Rd plus ±0.1%FS
Repeatability <±0.2% Rd (or <±0.04% FS whichever is
greater)
Turndown ratio 1:150 (1:50 in analog mode)
Multi fluid capability storage of max. 8 calibration curves
Operating temperature -10…+70°C
Temperature sensitivity zero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Pressure sensitivity 0.1% Rd/bar typical N2; 0.01% Rd/bar typical
H2
Mounting max. error at 90° off horizontal 0.2% at 1 bar,
typical N2
Warm-up time 30 minutes
Storage/transport conditions 0…+50°C, max. 95% RH (non-condensing)
Approvals
Marking CE