EL-FLOW Prestige FG-201CV
High Performance Mass Flow Controller for Gases
- ♦ On-board gas conversion model (Multi-Fluid / Multi-Range)
- ♦ 100 unique gases embedded
- ♦ User configurable I/O functions
- ♦ Significantly reduced power consumption
- ♦ Further advances in flow-signal processing
- ♦ Highly stable flow control regime virtually impervious to process fluctuations
- ♦ Advanced control valve design
Gas Mass Flow Controllers for low flow rates
Bronkhorst® model FG-201CV High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,14…7 mln/min and 0,4…20 ln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.
EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Technical specifications
| Measurement / control system | |
|---|---|
| Flow range (intermediate ranges available) | min. 0,14…7 mln/min max. 0,4…20 ln/min (based on N2) |
| Accuracy (incl. linearity) (based on actual calibration) | ± 0,5 % RD plus ±0,1%FS |
| Repeatability | < 0,2 % RD |
| Turndown ratio | 1:150 (1:50 in analog mode) |
| Multi Gas/Multi Range | embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 64 bar. |
| Settling time (in control, typical) | fast: < 500 msec standard: < 1 sec slow: < 2 sec |
| Control stability | ≤ ± 0,1 % FS (typical for 1 ln/min N2) |
| Operating temperature | -10 … 70 °C |
| Temperature sensitivity | zero: < 0,02% FS/°C; span: < 0,025% Rd/°C |
| Pressure sensitivity | <0,15% Rd/bar typical N2; < 0,02% Rd/bar N2 (incl. pressure correction option) |
| Max. Kv-value | 6,6 x 10-2 |
| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
| Attitude sensitivity | max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2 |
| Warm-up time | 30 min. for optimum accuracy 2 min. for accuracy ± 1% FS |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | Stainless steel 316L or comparable, degreased for use on oxygen (O2) |
| Pressure rating (PN) | 64 bar g |
| Process connections | compression type or face seal (VCR/VCO) couplings |
| Seals | standard: FKM/Viton® options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds valve seat: FFKM with PI film |
| Weight | 0,7 kg |
| Ingress protection | IP40 |
| Electrical properties | |||||
|---|---|---|---|---|---|
| Power supply | +15 … 24 Vdc | ||||
| Max. power consumption |
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| Analog output | 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||||
| Digital communication | standard: RS232; options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS |
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| Certification | CE / UKCA | ||||
| Electrical connection | |
|---|---|
| Analog/RS232 | 9-pin D-connector (male); |
| PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
| CANopen® / DeviceNet™ | 5-pin M12-connector (male); |
| FLOW-BUS/Modbus-RTU/ASCII | RJ45 modular jack |
| Modbus TCP / EtherNet/IP / POWERLINK | 2 x RJ45 modular jack (in/out); |
| EtherCAT®/ PROFINET | 2 x RJ45 modular jack (in/out) |
| IEC 61010-1 | IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12) |