FLEXI-FLOW Compact FF-Sxxx
Preconfigured Standard Mass Flow Controller
- ♦ Swift and stable control
- ♦ On-board gas conversion model
- ♦ 22 unique gases embedded
- ♦ Multi-parameter output: mass flow and temperature
- ♦ USB-C and Bluetooth communication
- ♦ Namur NE107 status indication

Preconfigured Standard (PS) Mass Flow Controllers
FLEXI-FLOW Compact Preconfigured Standard (PS) Mass Flow Controllers are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.
FLEXI-FLOW Compact Preconfigured Standard (PS) Mass Flow Controllers feature a turndown of 1:50, flow control + temperature output). They are available in 4 flow ranges (FS, based on N2):
Type FF-S500 – 500 mln/min
Type FF-S2K0 – 2 ln/min
Type FF-S5K0 – 5 ln/min
Type FF-S20K – 20 ln/min
Technical specifications
Measurement / control system | |
---|---|
Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
Accuracy (incl. linearity) (based on actual calibration) | ±1,5% Rd plus ±0,5% FS (N2/Air/O2) for other gases add conversion uncertainty; see multi gas table; |
Repeatability | ≤ ± 0,2% Rd |
Turndown ratio | 1:50 |
Max. operating pressure | 16 bar(g) |
Multi Gas / Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
Settling time (in control, typical) | < 150 ms |
Long term stability | < 0,5% FS over period of 3 years; then < 0,2% FS per year |
Control stability | < ± 0,1% FS (typical for 1 ln/min N2) |
Operating temperature | 0 … 50 °C |
Storage / Transport conditions | -20 … +50 °C, max. 95% RH (non-condensing) |
Mounting | any position, attitude sensitivity negligible |
Temperature sensitivity | zero 0,015% FS/ºC; span 0,05% Rd/ºC |
Temperature accuracy | ± 0,2 ºC (instrument body temperature) |
Pressure sensitivity | standard: < 0,15% Rd/bar typical N2 |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Leak-by through closed valve | typical < 1 x 10-4 mbar·l/s He |
Mechanical parts | |
---|---|
Instrument body | Aluminium |
Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
Surface quality | < 1,6 mu Ra |
Pressure rating (PN) | 16 bar(g) / 250 psig 16 bar(g) / 250 psig |
Max. ΔP | 16 bar(d); 20 ln/min models: 5 bar (d) |
Process connections | BSPP female thread (ISO1179-1); couplings to be ordered separately |
Seals | FKM 51415; valve seat: FFKM with PI film |
Weight | 200 g |
Ingress protection | IP40 |
Electrical properties | |
---|---|
Power supply | 24 Vdc ± 10% |
Max. power consumption | 2,5 Watt (typical, in control) |
Digital communication | Modbus RTU or FLOW-BUS (selectable) |
Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
Electrical connection | 9-pin D-sub (male) |
Certification | CE / UKCA / KC |