FLEXI-FLOW Compact FF-M1xD

Downported Mass Flow and Pressure Meter

  • ♦ On-board gas conversion model
  • ♦ 22 unique gases embedded
  • ♦ Multi-parameter output: mass flow, temperature and pressure
  • ♦ USB-C and Bluetooth communication
  • ♦ Namur NE107 status indication
  • ♦ Top-mount construction; easily accessible

Downported Mass Flow/Pressure Meters

FLEXI-FLOW Compact models FF-M10D and FF-M11D Downported Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion.

The multi-parameter instruments provide the user with useful process information: 
– Model FF-M10D: flow + temperature
– Model FF-M11D: flow + temperature + up- and downstream pressure

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure rangesFF-M10D: not available / FF-M11D: 0…17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2);
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioup to 1:1000
Max. operating pressure16 bar g
Multi Gas/Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Response time (sensor)< 30 ms (T63)
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Operating temperature0 … 50 °C
Storage / Transport conditions-20 … +80 °C, max. 95% RH (non-condensing)
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: typical factor 5 improved
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Mechanical parts
Instrument body Aluminium or Stainless steel (selectable)
Material (wetted parts) aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality < 1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN) 16 bar(g) / 250 psig
 Process connections downported construction
Seals default: FKM 51415;
for other materials contact factory
Weight 275 g with Aluminium body, 375 g with SS 316 body;
add 50 g for Ethernet interface
Ingress protection IP40
   
Electrical properties
Power supply 24 Vdc ± 10%
Max. power consumption 0,5 Watt;
add 0,9 Watt for EtherNet communication
Digital communication Modbus RTU or FLOW-BUS (selectable)
Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK
Support interface USB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection 9-pin D-sub (male)
Certification CE / UKCA / KC
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