FLEXI-FLOW Compact FF-M1x
Built-to-Order Mass Flow and Pressure Meter
- ♦ On-board gas conversion model
- ♦ 22 unique gases embedded
- ♦ Multi-parameter output: mass flow, temperature and pressure
- ♦ USB-C and Bluetooth communication
- ♦ Namur NE107 status indication

Mass Flow/Pressure Meters for Low Gas Flows
FLEXI-FLOW Compact models FF-M10 and FF-M11 Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information:
– Model FF-M10: flow + temperature
– Model FF-M11: flow + temperature + up- and downstream pressure
Technical specifications
Measurement / control system | |
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Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
Pressure ranges | FF-M10: not available / FF-M11: 0…17 bar(a) |
Accuracy (incl. linearity) (based on actual calibration) | Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2); for other gases add conversion uncertainty; see multi gas table; |
Repeatability | Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS |
Turndown ratio | up to 1:1000 |
Max. operating pressure | 16 bar g |
Multi Gas/Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
Response time (sensor) | < 30 ms (T63) |
Long term stability | < 0,5% FS over period of 3 years; then < 0,2% FS per year |
Operating temperature | 0 … 50 °C |
Storage / Transport conditions | -20 … +50 °C, max. 95% RH (non-condensing) |
Mounting | any position, attitude sensitivity negligible |
Temperature sensitivity | Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC |
Temperature accuracy | ± 0,2 ºC (instrument body temperature) |
Accuracy pressure sensors | ±0,5% FS |
Pressure sensitivity | standard: < 0,15% Rd/bar typical N2; with pressure correction: typical factor 5 improved |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Mechanical parts | |
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Instrument body | Aluminium or Stainless steel (selectable) |
Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
Surface quality | < 1,6 mu Ra (<0,8 mu Ra for stainless steel body) |
Pressure rating (PN) | 16 bar(g) / 250 psig |
Process connections | default: BSPP female thread (ISO1179-1) optional: compression type, push-in or face seal fitting |
Seals | default: FKM 51415; for other materials contact factory |
Weight | 225 g with Aluminium body, 325 g with SS 316 body; add 50 g for Ethernet interface |
Ingress protection | IP40 |
Electrical properties | |
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Power supply | 24 Vdc ± 10% |
Max. power consumption | 0,5 Watt; add 0,9 Watt for EtherNet communication |
Digital communication | Modbus RTU or FLOW-BUS (selectable) Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK |
Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
Electrical connection | 9-pin D-sub (male) |
Certification | CE / UKCA / KC |