FLEXI-FLOW Compact FF-C1xS
Mass Flow and Pressure Controller with Shut-Off Valve
- ♦ Swift and stable control
- ♦ Space-efficient, integrated shut-off valve
- ♦ On-board gas conversion model
- ♦ 22 unique gases embedded
- ♦ Multi-parameter output: mass flow, temperature and pressure
- ♦ USB-C and Bluetooth communication
- ♦ Namur NE107 status indication

Mass Flow / Pressure Controllers with shut-off valves
FLEXI-FLOW Compact models FF-C10S and FF-C11S Mass Flow / Pressure Controllers with integrated shut-off valves. They are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.
FF-C1x Mass Flow / Pressure Controllers with shut-off valve are Built-to-Order (BtO) and currently available in 2 variants:
- Type FF-C10S: flow + temperature
- Type FF-C11S: flow + temperature + up- and downstream pressure
Technical specifications
Measurement / control system | |
---|---|
Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
Pressure ranges | FF-C10S: not available / FF-C11S: 0…17 bar(a) |
Accuracy (incl. linearity) (based on actual calibration) | Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2) for other gases add conversion uncertainty; see multi gas table; |
Repeatability | Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS |
Turndown ratio | up to 1:1000 |
Max. operating pressure | 16 bar(g) |
Multi Gas / Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
Settling time (in control, typical) | < 150 ms |
Long term stability | < 0,5% FS over period of 3 years; then < 0,2% FS per year |
Control stability | < ± 0,1% FS (typical for 1 ln/min N2) |
Operating temperature | 0 … 50 °C |
Storage / Transport conditions | -20 … +80 °C, max. 95% RH (non-condensing) |
Mounting | any position, attitude sensitivity negligible |
Temperature sensitivity | Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC |
Temperature accuracy | ± 0,2 ºC (instrument body temperature) |
Accuracy pressure sensors | ±0,5% FS |
Pressure sensitivity | standard: < 0,15% Rd/bar typical N2; with pressure correction: typical factor 5 improved |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Leak-by through closed valve | typical < 1 x 10-4 mbar·l/s He; < 2 x 10-8 mbar·l/s He for shut-off valve |
Mechanical parts | |
---|---|
Instrument body | Aluminium or Stainless steel (selectable) |
Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
Surface quality | < 1,6 mu Ra |
Pressure rating (PN) | 16 bar(g) / 250 psig |
Max. ΔP | 16 bar(d); 20 ln/min models: 5 bar (d) |
Process connections | BSPP female thread (ISO1179-1); couplings to be ordered separately |
Seals | FKM 51415; valve seat: FFKM with PI film |
Weight | 350 g with Aluminium body, 450 g with SS 316 body; add 50 g for Ethernet interface |
Ingress protection | IP40 |
Electrical properties | |
---|---|
Power supply | 24 Vdc ± 10% |
Max. power consumption | 2,5 Watt (typical, in control); add 0,9 Watt for EtherNet communication; add 2,4 Watt for integrated shut-off (N/C) |
Digital communication | Modbus RTU or FLOW-BUS (selectable) Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK |
Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
Electrical connection | 9-pin D-sub (male) |
Certification | CE / UKCA / KC |