FLEXI-FLOW Compact FF-C1x

Built-to-Order Mass Flow and Pressure Controller

  • ♦ Swift and stable control
  • ♦ On-board gas conversion model
  • ♦ 22 unique gases embedded
  • ♦ Multi-parameter output: mass flow, temperature and pressure
  • ♦ USB-C and Bluetooth communication
  • ♦ Namur NE107 status indication

Mass Flow / Pressure Controllers for Low Gas Flows

FLEXI-FLOW Compact models FF-C10 and FF-C11 Built-to-Order (BtO) Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information. 

FLEXI-FLOW Compact Built-to-Order models feature a Mass Flow / Pressure Controllers a turndown to 1:1000; free selection of ranges between 0,5 and 20 ln/min (FS, based on N2). They are currently available in 2 variants:

  • Type FF-C10: flow + temperature
  • Type FF-C11: flow + temperature + up- and downstream pressure

BtO models may also be used to configure multi-channel versions up to 8 channels.

 


Technical specifications
Measurement / control system
Flow range (intermediate ranges available)min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure rangesFF-C10: not available / FF-C11: 0…17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2);
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioup to 1:1000
Max. operating pressure16 bar(g)
Multi Gas/Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Settling time (in control, typical)150 ms
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability< ± 0,1% FS (typical for 1 ln/min N2)
Operating temperature0 … 50 °C
Storage / Transport conditions-20 … +50 °C, max. 95% RH (non-condensing)
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: typical factor 5 improved
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Leak-by through closed valvetypical < 1 x 10-4 mbar·l/s He
Mechanical parts
Instrument body Aluminium or Stainless steel (selectable)
Material (wetted parts) aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality 1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN) 16 bar(g) / 250 psig
Max. ΔP 16 bar(d);
20 ln/min models: 5 bar (d)
Process connections default: BSPP female thread (ISO1179-1)
optional: compression type, push-in or face seal fittings
Seals FKM 51415; valve seat: FFKM with PI film;
for other materials contact factory
Weight 200 g with Aluminium body, 300 g with SS 316 body;
add 50 g for Ethernet interface
Ingress protection IP40
Electrical properties
Power supply24 Vdc ± 10%
Max. power consumption2,5 Watt (typical, in control);
add 0,9 Watt for EtherNet communication
Digital communicationModbus RTU or FLOW-BUS (selectable)
Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK
Support interfaceUSB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection9-pin D-sub (male)
CertificationCE / UKCA / KC
Scroll to Top