IN-FLOW F-210CI
Industrial Style Thermal Mass Flow Controller for Gases
♦ Lowest gas flow rates
♦ Compact design, small internal volume
♦ High accuracy and repeatability
♦ Virtually pressure and temperature independent
♦ Rugged, weatherproof housing (IP65, dust and waterproof)
♦ Pressure rating 100 bar

Industrial Style Gas Mass Flow Controllers for lowest flow rates
Bronkhorst® model F-210CI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with operating pressures up to 100 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 or FM Class I, Div. 2 approval.
IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.
Technical specifications
Measurement / control system | |
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Flow range (intermediate ranges available) | min. 0,014…0,7 mln/min max. 0,18…9 mln/min (based on N2) |
Accuracy (incl. linearity) (based on actual calibration) | ±0,8% Rd plus ±0,2% FS for F-210CI-005; ±2% FS for F-210CI-002 |
Repeatability | < 0,2 % RD |
Turndown ratio | up to 1:187,5 (1:50 in analog mode) |
Multi fluid capability | Storage of max. 8 calibration curves |
Settling time (in control, typical) | 2 … 4 sec. |
Control stability | < ± 0,1 % FS |
Operating temperature | -10 … +70 °C for ATEX cat. 3 and FM Class 1 Div 2 : 0…50°C |
Temperature sensitivity | zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
Pressure sensitivity | 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
Max. Kv-value | 6,6 x 10-2 |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Attitude sensitivity | max. error at 90° off horizontal 0,2% at 1 bar, typical N2 |
Warm-up time | 30 min. for optimum accuracy 2 min for accuracy ± 2% FS |
Mechanical parts | |
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Material (wetted parts) | stainless steel 316L or comparable |
Pressure rating (PN) | 100 bar abs |
Process connections | compression type or face seal couplings |
Seals | standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds |
Weight | 1,3 kg |
Ingress protection | IP65 |
Electrical properties | |||||
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Power supply | +15 … 24 Vdc | ||||
Max. power consumption |
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Analog output | 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||||
Digital communication | standard: RS232; options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS |
Electrical connection | |
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Analog/RS232 | 8 DIN (male); |
PROFIBUS DP | bus: 5-pin M12 (female); power: 8 DIN (male); |
CANopen® / DeviceNet™ | 5-pin M12 (male); |
FLOW-BUS/Modbus-RTU/ASCII | 5-pin M12 (male) |
Modbus TCP / EtherNet/IP / POWERLINK | bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male); |
EtherCAT®/ PROFINET | bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male); |
IEC 61010-1 | IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12) |
Technical specifications subject to change without notice.