IN-FLOW F-110CI
Industrial Style Thermal Mass Flow Meter for Gases
- ♦ Lowest gas flow ranges
- ♦ Compact design, small internal volume
- ♦ High accuracy
- ♦ Virtually pressure and temperature independent
- ♦ Rugged, weatherproof housing (IP65, dust and waterproof)

Industrial Style Gas Mass Flow Meters for lowest flow rates
Bronkhorst® model F-110CI Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with pressure rating between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 or FM Class I, Div. 2 approval.
IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The IN-FLOW model features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Bronkhorst® model F-110CI Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with pressure rating between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 or FM Class I, Div. 2 approval.
IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The IN-FLOW model features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Technical specifications
Measurement / control system Flow range (intermediate ranges available) min. 0,014…0,7 mln/min
max. 0,06…9 mln/min
(based on N2) Accuracy (incl. linearity) (based on actual calibration) ±0,8% Rd plus ±0,2% FS for F-110CI-005;
±2% FS for F-110CI-002 Repeatability < 0,2 % RD Turndown ratio up to 1:187,5 (1:50 in analog mode) Multi fluid capability storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs Response time (sensor) FS < 3 mln/min: 2 sec;
FS > 3 mln/min: 1…2 sec Operating temperature -10 … +70 °C
for ATEX cat. 3 and FM Class 1 Div 2 : 0…50°C Temperature sensitivity zero: < 0,05% FS/°C; span: < 0,05% Rd/°C Pressure sensitivity 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 Leak integrity, outboard tested < 2 x 10-9 mbar l/s He Attitude sensitivity max. error at 90° off horizontal 0,2% FS at 1 bar, typical N2 Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts Material (wetted parts) stainless steel 316L or comparable Pressure rating (PN) 100 bar abs Process connections compression type or face seal couplings Seals standard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds Weight 0,8 kg Ingress protection IP65
Electrical properties Power supply +15 … 24 Vdc Max. power consumption meter Supply
15 V
24 V at voltage I/O
95 mA
65 mA at current I/O
125 mA
85 mA extra for fieldbus
<75 mA
<50 mA
Max. Power consumption controller Supply
15 V
24 V at voltage I/O
290 mA
200 mA at current I/O
320 mA
215 mA extra for fieldbus
<75 mA
<50 mA
Analog output 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) Digital communication standard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection Analog/RS232 8 DIN (male); PROFIBUS DP bus: 5-pin M12 (female);
power: 8 DIN (male); CANopen® / DeviceNet™ 5-pin M12 (male); FLOW-BUS/Modbus-RTU/ASCII 5-pin M12 (male) Modbus TCP / EtherNet/IP / POWERLINK bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male); EtherCAT®/ PROFINET bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male) IEC 61010-1 IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Technical specifications subject to change without notice.
Measurement / control system | |
---|---|
Flow range (intermediate ranges available) | min. 0,014…0,7 mln/min max. 0,06…9 mln/min (based on N2) |
Accuracy (incl. linearity) (based on actual calibration) | ±0,8% Rd plus ±0,2% FS for F-110CI-005; ±2% FS for F-110CI-002 |
Repeatability | < 0,2 % RD |
Turndown ratio | up to 1:187,5 (1:50 in analog mode) |
Multi fluid capability | storage of max. 8 calibration curves; optional Multi Gas / Multi Range functionality up to 10 bar abs |
Response time (sensor) | FS < 3 mln/min: 2 sec; FS > 3 mln/min: 1…2 sec |
Operating temperature | -10 … +70 °C for ATEX cat. 3 and FM Class 1 Div 2 : 0…50°C |
Temperature sensitivity | zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
Pressure sensitivity | 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Attitude sensitivity | max. error at 90° off horizontal 0,2% FS at 1 bar, typical N2 |
Warm-up time | 30 min. for optimum accuracy 2 min for accuracy ± 2% FS |
Mechanical parts | |
---|---|
Material (wetted parts) | stainless steel 316L or comparable |
Pressure rating (PN) | 100 bar abs |
Process connections | compression type or face seal couplings |
Seals | standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds |
Weight | 0,8 kg |
Ingress protection | IP65 |
Electrical properties | |||||
---|---|---|---|---|---|
Power supply | +15 … 24 Vdc | ||||
Max. power consumption meter |
| ||||
Max. Power consumption controller |
| ||||
Analog output | 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||||
Digital communication | standard: RS232; options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS |
Electrical connection | |
---|---|
Analog/RS232 | 8 DIN (male); |
PROFIBUS DP | bus: 5-pin M12 (female); power: 8 DIN (male); |
CANopen® / DeviceNet™ | 5-pin M12 (male); |
FLOW-BUS/Modbus-RTU/ASCII | 5-pin M12 (male) |
Modbus TCP / EtherNet/IP / POWERLINK | bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male); |
EtherCAT®/ PROFINET | bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male) |
IEC 61010-1 | IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12) |
Technical specifications subject to change without notice.