EL-FLOW Select F-201CV
Digital Thermal Mass Flow Controller for Gases
- ♦ High accuracy
- ♦ Fast response, excellent repeatability
- ♦ Optional Multi Fluid / Multi Range functionality
- ♦ Virtually pressure and temperature independent
- ♦ Compact design

Gas Mass Flow Controllers for low flow rates
Bronkhorst® model F-201CV Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,16…8 mln/min and 0,5…25 ln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.
EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Bronkhorst® model F-201CV Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,16…8 mln/min and 0,5…25 ln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.
EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Technical specifications
Measurement / control system Flow range (intermediate ranges available) min. 0,16…8 mln/min
max. 0,5…25 ln/min
(based on N2) Accuracy (incl. linearity) (based on actual calibration) ± 0,5 % RD plus ±0,1%FS Repeatability < 0,2 % RD Turndown ratio up to 1:187,5 (1:50 in analog mode) Multi fluid capability storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs Settling time (in control, typical) standard: 1…2 seconds
option: down to 500 msec Control stability < ± 0,1 % FS (typical for 1 ln/min N2) Operating temperature -10 … +70 °C Temperature sensitivity zero: < 0,05% FS/°C; span: < 0,05% Rd/°C Pressure sensitivity < 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 Max. Kv-value 6,6 x 10-2 Leak integrity, outboard tested < 2 x 10-9 mbar l/s He Attitude sensitivity max. error at 90° off horizontal 0,2% at 1 bar, typical N2 Warm-up time 30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts Material (wetted parts) Stainless steel 316L or comparable Pressure rating (PN) 64 bar abs Process connections compression type or face seal (VCR/VCO) couplings Seals standard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds Weight 0,6 kg Ingress protection IP40
Electrical properties Power supply +15 … 24 Vdc Max. power consumption Supply
15 V
24 V at voltage I/O
290 mA
200 mA at current I/O
320 mA
215 mA extra for fieldbus
<75 mA
<50 mA
Analog output 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) Digital communication standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
Electrical connection Analog/RS232 9-pin D-connector (male); PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male); CANopen® / DeviceNet™ 5-pin M12-connector (male); FLOW-BUS/Modbus-RTU/ASCII RJ45 modular jack Modbus TCP / EtherNet/IP / POWERLINK 2 x RJ45 modular jack (in/out); EtherCAT®/ PROFINET 2 x RJ45 modular jack (in/out)
Technical specifications subject to change without notice.
Measurement / control system | |
---|---|
Flow range (intermediate ranges available) | min. 0,16…8 mln/min max. 0,5…25 ln/min (based on N2) |
Accuracy (incl. linearity) (based on actual calibration) | ± 0,5 % RD plus ±0,1%FS |
Repeatability | < 0,2 % RD |
Turndown ratio | up to 1:187,5 (1:50 in analog mode) |
Multi fluid capability | storage of max. 8 calibration curves; optional Multi Gas / Multi Range functionality up to 10 bar abs |
Settling time (in control, typical) | standard: 1…2 seconds option: down to 500 msec |
Control stability | < ± 0,1 % FS (typical for 1 ln/min N2) |
Operating temperature | -10 … +70 °C |
Temperature sensitivity | zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
Pressure sensitivity | < 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
Max. Kv-value | 6,6 x 10-2 |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Attitude sensitivity | max. error at 90° off horizontal 0,2% at 1 bar, typical N2 |
Warm-up time | 30 min. for optimum accuracy 2 min. for accuracy ± 2% FS |
Mechanical parts | |
---|---|
Material (wetted parts) | Stainless steel 316L or comparable |
Pressure rating (PN) | 64 bar abs |
Process connections | compression type or face seal (VCR/VCO) couplings |
Seals | standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds |
Weight | 0,6 kg |
Ingress protection | IP40 |
Electrical properties | |||||
---|---|---|---|---|---|
Power supply | +15 … 24 Vdc | ||||
Max. power consumption |
| ||||
Analog output | 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||||
Digital communication | standard: RS232; options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS |
Electrical connection | |
---|---|
Analog/RS232 | 9-pin D-connector (male); |
PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
CANopen® / DeviceNet™ | 5-pin M12-connector (male); |
FLOW-BUS/Modbus-RTU/ASCII | RJ45 modular jack |
Modbus TCP / EtherNet/IP / POWERLINK | 2 x RJ45 modular jack (in/out); |
EtherCAT®/ PROFINET | 2 x RJ45 modular jack (in/out) |
Technical specifications subject to change without notice.