MASS-STREAM D-6371A/003AI &
D-6471A/003AI MFC
Direct Thermal Mass Flow Controller for Gases, IP65 protected
- ♦ Proven direct inline CTA sensor (no bypass)
- ♦ Compact, rugged design (IP65, dust and waterproof)
- ♦ Less sensitivity to humidity or dirt
- ♦ Optional with integrated TFT display
- ♦ Very good price-performance ratio

Compact IP65 Mass Flow Controllers for medium flow rates of gases
Bronkhorst® models D-6361A/002BI and D-6461A/002BI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 1…50 ln/min and 10…500 ln/min at operating pressures between vacuum and 20 bar. The MFC consists of a proven inline thermal (CTA) mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.
The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.
Bronkhorst® models D-6361A/002BI and D-6461A/002BI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 1…50 ln/min and 10…500 ln/min at operating pressures between vacuum and 20 bar. The MFC consists of a proven inline thermal (CTA) mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.
The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.
Technical specifications
Measurement / control system Flow range (intermediate ranges available) min. 1…50 ln/min
max. 10…500 ln/min
(based on N2) Accuracy (incl. linearity) (based on actual calibration) ± 1,0 % RD plus ± 0.5% FS (at calibration conditions) Repeatability < 0,2 % FS Turndown ratio 1:50 Type of gases almost all gases, compatible with chosen materials Response time (sensor) approx. 0,9 sec. Settling time (in control, typical) < 2 sec. Control stability < 0,2 % FS typical Operating temperature 10 … 50 °C Storage / Transport conditions with display : 0 … 50 °C, max. 95% RH (non-condensing);
without display : -20 … +80 °C, max. 95% RH (non-condensing) Temperature sensitivity D-63xx : ±0,2% Rd/°C (Air)
D-64xx : ±0,1% Rd/°C (Air) Pressure sensitivity ± 0,3% Rd/bar typical (Air) Max. Kv-value 0,035 … 0,35 Leak integrity, outboard tested < 2 x 10-8 mbar l/s He Attitude sensitivity at 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2 Warm-up time 30 min. for optimum accuracy,
within 30 seconds for accuracy ±4% FS
Mechanical parts Sensor Stainless steel SS 316 (AISI 316L) Instrument body Stainless steel SS 316 Sieves and rings Stainless steel SS 316 Pressure rating (PN) 20 bar g Max. ΔP 5 bar d Process connections G1/2″ (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) /
compression type or face seal (VCR/VCO) couplings Seals standard: FKM/Viton®;
option: EPDM, FFKM/Kalrez® Weight Aluminium: 1,7 kg
Stainless steel: 2,2 kg Ingress protection IP65
Electrical properties Power supply +15 … 24 Vdc ±10% Max. power consumption Supply
15 V
24 V Basic model
300 mA
200 mA Add. for fieldbus
80 mA
50 mA Add. for display
30 mA
20 mA
Analog output 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) Digital communication standard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection Analog/RS232 8 DIN (male); PROFIBUS DP bus: 5-pin M12 (female);
power: 8 DIN (male) CANopen® / DeviceNet™ 5-pin M12 (male) Modbus RTU / FLOW-BUS 5-pin M12 (male) Modbus TCP / EtherNet/IP / POWERLINK bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male); EtherCAT®/ PROFINET bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male)
Technical specifications subject to change without notice.
Measurement / control system | |
---|---|
Flow range (intermediate ranges available) | min. 1…50 ln/min max. 10…500 ln/min (based on N2) |
Accuracy (incl. linearity) (based on actual calibration) | ± 1,0 % RD plus ± 0.5% FS (at calibration conditions) |
Repeatability | < 0,2 % FS |
Turndown ratio | 1:50 |
Type of gases | almost all gases, compatible with chosen materials |
Response time (sensor) | approx. 0,9 sec. |
Settling time (in control, typical) | < 2 sec. |
Control stability | < 0,2 % FS typical |
Operating temperature | 10 … 50 °C |
Storage / Transport conditions | with display : 0 … 50 °C, max. 95% RH (non-condensing); without display : -20 … +80 °C, max. 95% RH (non-condensing) |
Temperature sensitivity | D-63xx : ±0,2% Rd/°C (Air) D-64xx : ±0,1% Rd/°C (Air) |
Pressure sensitivity | ± 0,3% Rd/bar typical (Air) |
Max. Kv-value | 0,035 … 0,35 |
Leak integrity, outboard | tested < 2 x 10-8 mbar l/s He |
Attitude sensitivity | at 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2 |
Warm-up time | 30 min. for optimum accuracy, within 30 seconds for accuracy ±4% FS |
Mechanical parts | |
---|---|
Sensor | Stainless steel SS 316 (AISI 316L) |
Instrument body | Stainless steel SS 316 |
Sieves and rings | Stainless steel SS 316 |
Pressure rating (PN) | 20 bar g |
Max. ΔP | 5 bar d |
Process connections | G1/2″ (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) / compression type or face seal (VCR/VCO) couplings |
Seals | standard: FKM/Viton®; option: EPDM, FFKM/Kalrez® |
Weight | Aluminium: 1,7 kg Stainless steel: 2,2 kg |
Ingress protection | IP65 |
Electrical properties | |||||
---|---|---|---|---|---|
Power supply | +15 … 24 Vdc ±10% | ||||
Max. power consumption |
| ||||
Analog output | 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||||
Digital communication | standard: RS232 options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS |
Electrical connection | |
---|---|
Analog/RS232 | 8 DIN (male); |
PROFIBUS DP | bus: 5-pin M12 (female); power: 8 DIN (male) |
CANopen® / DeviceNet™ | 5-pin M12 (male) |
Modbus RTU / FLOW-BUS | 5-pin M12 (male) |
Modbus TCP / EtherNet/IP / POWERLINK | bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male); |
EtherCAT®/ PROFINET | bus: 2 x 5-pin M12 (female) (in/out); power: 8 DIN (male) |
Technical specifications subject to change without notice.